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Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge

โœ Scribed by Bogaerts, Annemie; Yan, Min; Gijbels, Renaat; Goedheer, Wim


Book ID
120219659
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
381 KB
Volume
86
Category
Article
ISSN
0021-8979

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In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), cur