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Continuum modeling of argon radio frequency glow discharges

✍ Scribed by Richards, Albert D.; Thompson, Brian E.; Sawin, Herbert H.

Book ID
111933239
Publisher
American Institute of Physics
Year
1987
Tongue
English
Weight
572 KB
Volume
50
Category
Article
ISSN
0003-6951

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πŸ“œ SIMILAR VOLUMES

Polymerization in radio frequency glow d
Polymerization in radio frequency glow dischargesβ€”I
✍ K.C. Brown πŸ“‚ Article πŸ“… 1972 πŸ› Elsevier Science 🌐 English βš– 481 KB

Polymerizations in radio frequency glow discharges have been studied with a view to increasing polymer deposition rates and to investigate the reaction mechanism. The data are consistent with a scheme in which electrons or ions from the discharge polymerize a limited number of adsorbed monomer molec

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✍ K.C. Brown; M.J. Copsey πŸ“‚ Article πŸ“… 1972 πŸ› Elsevier Science 🌐 English βš– 330 KB

The effects of varying the monomer flow pattern, the ~ometry and dimensions of e!ectrode structures and other discharge parameters on the deposition rate of polymer films on electrode surfaces in r.f. discharges in monomer vapours are described. The results are consistent with the view that polymeri