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Sheath dynamics in radio-frequency atmospheric glow discharges

✍ Scribed by Shi, J.J.; Kong, M.G.

Book ID
118202140
Publisher
IEEE
Year
2005
Tongue
English
Weight
131 KB
Volume
33
Category
Article
ISSN
0093-3813

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The effects of varying the monomer flow pattern, the ~ometry and dimensions of e!ectrode structures and other discharge parameters on the deposition rate of polymer films on electrode surfaces in r.f. discharges in monomer vapours are described. The results are consistent with the view that polymeri