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Plasma sheath thickness in radio‐frequency discharges

✍ Scribed by Mutsukura, Nobuki; Kobayashi, Kenji; Machi, Yoshio

Book ID
111658769
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
640 KB
Volume
68
Category
Article
ISSN
0021-8979

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A Numerical Method to Simulate Radio-Fre
A Numerical Method to Simulate Radio-Frequency Plasma Discharges
✍ E.P. Hammond; K. Mahesh; P. Moin 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 248 KB

A fully conservative and efficient numerical algorithm is developed for fluid simulations of radio-frequency plasma discharges. Results are presented in one and multiple dimensions for a helium discharge. The algorithm produces accurate results even on fairly coarse grids without the use of numerica