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A Numerical Method to Simulate Radio-Frequency Plasma Discharges

✍ Scribed by E.P. Hammond; K. Mahesh; P. Moin


Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
248 KB
Volume
176
Category
Article
ISSN
0021-9991

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✦ Synopsis


A fully conservative and efficient numerical algorithm is developed for fluid simulations of radio-frequency plasma discharges. Results are presented in one and multiple dimensions for a helium discharge. The algorithm produces accurate results even on fairly coarse grids without the use of numerical dissipation. The proposed electron flux discretization is more accurate and efficient than two of the most commonly used discretizations: low-order upwinding (M. S.


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