✦ LIBER ✦
Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas
✍ Scribed by K. Dittmann; K. Matyash; S. Nemschokmichal; J. Meichsner; R. Schneider
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 911 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0005-8025
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