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Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages

✍ Scribed by A. Faes, G. Resta, F. Solazzi, B. Margesin

Book ID: 113047142
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 478 KB
Volume: 18
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1457-5

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