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Modeling of an Inductively Coupled Plasma for the Synthesis of Nanoparticles

โœ Scribed by Rodolphe Bolot; Christian Coddet; Cornelis Schreuders; Marc Leparoux; Stephan Siegmann

Book ID
107462031
Publisher
Springer US
Year
2007
Tongue
English
Weight
623 KB
Volume
16
Category
Article
ISSN
1059-9630

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Neural network modelling of the inductively coupled RF plasma synthesis of silicon nanoparticles
โœ Marc Leparoux; Marcel Loher; Cornelis Schreuders; Stephan Siegmann ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 614 KB

The synthesis of silicon nanopowders by an inductively coupled plasma (ICP) process is investigated. The specific surface area (SSA) of the elaborated particles is determined by nitrogen absorption (BET) as a function of the quenching gas flow rate and the precursor feeding rate. Nanopowders with sp