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Inductively-coupled nonthermal plasma for synthesis of silicon nanocrystals

✍ Scribed by Kyoung Suk Oh, Seongbeom Kim, Jeong Chul Lee, Young-Soo Sohn

Book ID: 119937289
Publisher: The Korean Physical Society
Year: 2012
Tongue: English
Weight: 353 KB
Volume: 61
Category: Article
ISSN: 0374-4884
DOI: 10.3938/jkps.61.995

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