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Modeling of a rf glow discharge plasma

✍ Scribed by Okazaki, Katsuji; Makabe, Toshiaki; Yamaguchi, Yukio

Book ID: 120486003
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 596 KB
Volume: 54
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.101277

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