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The rf glow-discharge sputtering model

✍ Scribed by Logan, J. S.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

PLASMA DIAGNOSTICS OF AN rf-SPUTTERING G

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✍ Ratinen, H. 📂 Article 📅 1972 🏛 American Institute of Physics 🌐 English ⚖ 510 KB

Modeling of a rf glow discharge plasma

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✍ Coburn, J. W. 📂 Article 📅 1975 🏛 AVS (American Vacuum Society) ⚖ 527 KB