✦ LIBER ✦

A mass spectrometric study of neutral−sputtered species in an rf glow discharge sputtering system

✍ Scribed by Coburn, J. W.

Book ID: 121743599
Publisher: AVS (American Vacuum Society)
Year: 1975
Weight: 527 KB
Volume: 12
Category: Article
ISSN: 0022-5355
DOI: 10.1116/1.568745

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mass-spectrometric sampling of the ionic

Mass-spectrometric sampling of the ionic and neutral species present in different regions of an RF discharge in methane

✍ M.J. Vasile; G. Smolinsky 📂 Article 📅 1975 🏛 Elsevier Science ⚖ 1016 KB

Mass Spectrometric Characterizations of

Mass Spectrometric Characterizations of Ions Generated in RF Magnetron Discharges during Sputtering of Silver in Ne, Ar, Kr an.d Xe Gases

✍ Pokorný, Petr; Novotný, Michal; Musil, Jindřich; Fitl, Přemysl; Bulíř, Jiří; Lan 📂 Article 📅 2013 🏛 John Wiley and Sons 🌐 English ⚖ 704 KB

176. A mass spectrometric study of the s

176. A mass spectrometric study of the species involved in carbon deposition from RF discharges in carbon containing gases

✍ H.E Evans; P.P Jennings 📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 112 KB

A mass spectrometric study of the neutra

A mass spectrometric study of the neutral and positive ionic species involved in carbon deposition from r.f. discharges in carbon containing gases

✍ H.E. Evans; P.P. Jennings 📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 1011 KB

A mass spectrometric study of species present in radio frequency discharges in binary mixtures of carbon dioxide, carbon monoxide, methane, oxygen and helium has been made. The positive ion spectra have been correlated with observations of deposit formation. Rates of formation and oxidation of depos