Mass Spectrometric Characterizations of Ions Generated in RF Magnetron Discharges during Sputtering of Silver in Ne, Ar, Kr an.d Xe Gases

✍ Scribed by Pokorný, Petr; Novotný, Michal; Musil, Jindřich; Fitl, Přemysl; Bulíř, Jiří; Lančok, Ján

• Book ID: 120527313
• Publisher: John Wiley and Sons
• Year: 2013
• Tongue: English
• Weight: 704 KB
• Volume: 10
• Category: Article
• ISSN: 1612-8850
• DOI: 10.1002/ppap.201200145