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RF magnetron sputtering of silver thin film in Ne, Ar and Kr discharges—plasma characterisation and surface morphology

✍ Scribed by Novotný, Michal; Bulíř, Jiří; Pokorný, Petr; Lančok, Ján; Fekete, Ladislav; Musil, Jindřich; Čekada, Miha

No coin nor oath required. For personal study only.

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