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Mass-spectrometric sampling of the ionic and neutral species present in different regions of an RF discharge in methane

✍ Scribed by M.J. Vasile; G. Smolinsky

Publisher: Elsevier Science
Year: 1975
Weight: 1016 KB
Volume: 18
Category: Article
ISSN: 0020-7381
DOI: 10.1016/0020-7381(75)87018-5

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