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176. A mass spectrometric study of the species involved in carbon deposition from RF discharges in carbon containing gases

✍ Scribed by H.E Evans; P.P Jennings

Publisher: Elsevier Science
Year: 1968
Tongue: English
Weight: 112 KB
Volume: 6
Category: Article
ISSN: 0008-6223
DOI: 10.1016/0008-6223(68)90480-6

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