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On the Mechanism of Nitrogenated Carbon Film Deposition by PACVD in the Presence of Nitrogen. A Cryo-Trapping Assisted Mass Spectrometric Study

✍ Scribed by F. L. Tabarés; D. Tafalla; J. A. Ferreira


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
498 KB
Volume
13
Category
Article
ISSN
0948-1907

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