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Modeling of a monosilane rf-discharge plasma

✍ Scribed by V. A. Shveigert; M. I. Zhilyaev; I. V. Shveigert

Book ID
105547230
Publisher
SP MAIK Nauka/Interperiodica
Year
1994
Tongue
English
Weight
533 KB
Volume
35
Category
Article
ISSN
0021-8944

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