𝔖 Bobbio Scriptorium
✦   LIBER   ✦

3092. rf discharge plasma conditions in a plasma processing apparatus. (GB)

Book ID
104264398
Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
137 KB
Volume
27
Category
Article
ISSN
0042-207X

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✦ Synopsis

method. The measured velocity distribution of the fast neutral atoms is described by the sum of two MaxwelI-Boltzmann distributions with temperatures on the order of 0.25 and 1 eV, respectively. This bimodal distribution is attributed to an overpopulation of the high-energy tail of the ion velocity distribution. The measured intensities of the fast neutrals vary between 5 ,~ 10 t'~ and 7. 10 ~' ~

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