Modeling of a pair of annular through silicon vias (TSV)
β Scribed by Xiao-Long Xu, ;Wen-Sheng Zhao, ;Wen-Yan Yin,
- Book ID
- 111964644
- Publisher
- IEEE
- Year
- 2011
- Weight
- 215 KB
- Series
- undefined series for scimag
- Category
- Article
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## Abstract This article presents a fullβwave electromagnetic approach for analyzing the electrical performance of massively coupled through silicon vias (TSV). The TSVs are modeled with SiO~2~ insulation coating and are placed in the sandwiched SiO~2~βSiβSiO~2~ substrate. The planar guided wave is
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