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Modeling emissivity of rough and textured silicon wafers

✍ Scribed by Bhushan L. Sopori; Wei Chen; S. Abedrabbo; N. M. Ravindra

Book ID
107457700
Publisher
Springer US
Year
1998
Tongue
English
Weight
149 KB
Volume
27
Category
Article
ISSN
0361-5235

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✍ S. Abedrabbo; J.C. Hensel; A.T. Fiory; B. Sopori; W. Chen; N.M. Ravindra πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 315 KB

A spectral emissometer operating in the wavelength range of 1Β±20 mm and temperature range of 30Β±9008C has been utilized to simultaneously measure the reΒ―ectance, transmittance and emittance of silicon. Interesting dierences in the optical properties have been reported due to dierences in surface mor