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Bidirectional Reflectance Distribution Function of Rough Silicon Wafers

โœ Scribed by Y. J. Shen; Z. M. Zhang; B. K. Tsai; D. P. DeWitt

Book ID
110292808
Publisher
Springer
Year
2001
Tongue
English
Weight
286 KB
Volume
22
Category
Article
ISSN
0195-928X

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By introducing scattering probability and statistical distribution functions of substrate subsurface defects' radiuses, refractive indices and positions, an extended bidirectional reflectance distribution function (BRDF) for polarized light scattering was derived on the foundation of Jones scatterin