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Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

โœ Scribed by Lee, Soo-Jin; Lee, Hyo-Chang; Bang, Jin-young; Oh, Seung-Ju; Chung, Chin-Wook


Book ID
122553542
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
779 KB
Volume
547
Category
Article
ISSN
0040-6090

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