Effects of nonlocal electron kinetics and transition from α to γ regime in an RF capacitive discharge in nitrogen

✍ Scribed by Tatarova, E.; Stoykova, E.; Bachev, K.; Zhelyazkov, I.

• Book ID: 114558473
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 271 KB
• Volume: 26
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.669620