✦ LIBER ✦

Modal analysis of multi-layer structure for chemical mechanical polishing process

✍ Scribed by Jinn-Tong Chiu; Yeou-Yih Lin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Analysis of retaining ring using finite

✍ Ship-Peng Lo; Yeou-Yih Lin; Jen-Ching Huang 📂 Article 📅 2006 🏛 Springer 🌐 English ⚖ 485 KB

Analysis and Application of Grey Relatio

✍ C.-Y. Ho; Z.-C. Lin 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 76 KB

A study of a finite element model for th

✍ Y.-Y. Lin; S.-P. Lo 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 392 KB

Improvement of rounding effect in chemic

✍ Myung-Jin Chung 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 English ⚖ 215 KB

Application of an Adaptive Neuro-Fuzzy I

✍ Z.-C. Lin; C.-Y. Liu 📂 Article 📅 2001 🏛 Springer 🌐 English ⚖ 168 KB

Optimization of carrier morphology in te

✍ Jinn-Tong Chiu; Yeou-Yih Lin 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 213 KB