✦ LIBER ✦
Optimization of carrier morphology in terms of Fourier sine series for chemical mechanical polishing process
✍ Scribed by Jinn-Tong Chiu; Yeou-Yih Lin
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 213 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0268-3768
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