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Analysis of retaining ring using finite element simulation in chemical mechanical polishing process

✍ Scribed by Ship-Peng Lo; Yeou-Yih Lin; Jen-Ching Huang

Publisher: Springer
Year: 2006
Tongue: English
Weight: 485 KB
Volume: 34
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-006-0622-3

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