Application of an Adaptive Neuro-Fuzzy Inference System for the Optimal Analysis of Chemical-Mechanical Polishing Process Parameters

✍ Scribed by Z.-C. Lin; C.-Y. Liu

• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 168 KB
• Volume: 18
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s001700170090