MOCVD of high quality YBa2Cu3O7−δ thin films using a fluorinated barium precursor

✍ Scribed by B.C. Richards; S.L. Cook; D.L. Pinch; G.W. Andrews; G. Lengeling; B. Schulte; H. Jürgensen; Y.Q. Shen; P. Vase; T. Freltoft; C.I.M.A. Spee; J.L. Linden; M.L. Hitchman; S.H. Shamlian; A. Brown

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 797 KB
• Volume: 252
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(95)00441-6

✦ Synopsis

MOCVD of superconducting YBa2Cu3OT_ 8 thin films using the novel fluorinated barium 13-diketonate complex [Ba(TDFND) 2 -tetraglyme] 1 in combination with [Y(TMHD) 3] 2 and [Cu(TMHD) 2] is reported. The Ba complex has a low melting point (72°C), is thermally stable to 200°C and allows reproducible and reliable film deposition even when maintained at 145°C for several weeks. Conversion of the fluoride to the oxide is achieved by in situ hydrolysis. Films deposited on SrTiO 3 (100) were characterised by scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, rocking curve, ac susceptibility and secondary ion mass spectrometry. Homogeneous layers of YBa2Cu307_8, N0.25 bLm thick, were grown at ~ 0.13 Ixm h -1. The films are epitaxial with good c axis orientation. Critical temperatures T c are typically 91 K and critical current densities Jc (at 77 K) of ~ 5 MA cm -2 are reported. SIMS results showing levels of residual fluorine do not exceed 250 ppm.