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Growth of high-quality ErBa2Cu3O7−δ thin films

✍ Scribed by T. Ohazama; M. Mukaida; A. Ichinose; K. Matsumoto; Y. Yoshida; S. Horii; A. Saito; S. Ohshima


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
771 KB
Volume
412-414
Category
Article
ISSN
0921-4534

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MOCVD of superconducting YBa2Cu3OT\_ 8 thin films using the novel fluorinated barium 13-diketonate complex [Ba(TDFND) 2 -tetraglyme] 1 in combination with [Y(TMHD) 3] 2 and [Cu(TMHD) 2] is reported. The Ba complex has a low melting point (72°C), is thermally stable to 200°C and allows reproducible a