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MOCVD of YBa2Cu3O7−x thin films using a Ba fluorocarbon-based precursor

✍ Scribed by K. Fröhlich; J. Šouc; S. Chromik; D. Machajdik; V. Kliment

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
414 KB
Volume
202
Category
Article
ISSN
0921-4534

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✦ Synopsis

We have prepared superconducting YBa2CU3OT_x films by MOCVD using fluorocarbon based Ba (hfa)2 precursor. The films were deposited at 500°C and annealed in low pressure (pO2= 10 -2 Pa) dry oxygen atmosphere as well as in argon/oxygen mixture in the presence of water vapour. The samples on a MgO single crystal substrate had Tc (R = 0) = 79 K and Jc = 10 + A/cm 2 at T= 30 K in zero magnetic field while the film on SrTiO3, annealed under the same conditions had Tc ( R = 0 ) = 86 K and Jc reached a value of l0 s A/cm 2 at T= 78 K.

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