✦ LIBER ✦

Minimization of dangling bond defects in hydrogenated silicon nitride dielectrics for thin film transistors (TFTs)

✍ Scribed by G Lucovsky; J.C Phillips

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Unification of the time and temperature

✍ Deane, S. C.; Wehrspohn, R. B.; Powell, M. J. 📂 Article 📅 1998 🏛 The American Physical Society 🌐 English ⚖ 98 KB

Reduction of bulk and interface defects

✍ G. Lucovsky; J.C. Phillips 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 637 KB

Reduction of bonding constraints by self

✍ G. Lucovsky; J.C. Phillips 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 297 KB