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Miniature electrostatic column for a compact scanning electron microscope

✍ Scribed by T. Ambe; H. Tanaka; H. Teguri; I. Honjo; A. Ito

Book ID: 114155411
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 527 KB
Volume: 61-62
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00477-x

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