Miniaturized electron gun for high-resolution scanning electron microscope using non-evaporable getter pumps

✍ Scribed by Souichi Katagiri; Takashi Ohshima

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 374 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.023