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A noncontact scanning electrostatic force microscope for surface profile measurement

✍ Scribed by Wei Gao; Shigeaki Goto; Keiichiro Hosobuchi; So Ito; Yuki Shimizu

Book ID
113537997
Publisher
International Academy for Production Engineering
Year
2012
Tongue
English
Weight
762 KB
Volume
61
Category
Article
ISSN
0007-8506

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In nanoprobing measurements the quality of the electrical contact strongly depends on the contact force. Probing semiconductors such as silicon requires applying very high and stable forces to establish an ohmic contact between the probe tip and the structure under study. Therefore, a compact force