✦ LIBER ✦

Microwave near-field plasma probe

✍ Scribed by V.J. Law

Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 318 KB
Volume: 51
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00199-7

No coin nor oath required. For personal study only.

✦ Synopsis

A near-field E-probe that measures the modulus of the standing-wave voltage developed in the non-magnetic microwave multi-mode resonant cavity plasma-tool is described. The time-domain probe data is used to deconvolve the gas dielectric stress-breakdown conditions for a series of gas mixtures (Ar and Ar/X 2 , where X = O 2 , N 2 and H 2 ) in the 5 mbar pressure range at an applied microwave power of 250 W (0.022 W • cm -3 ).

It is shown that the E-probe provides global RF information (signature) on the electromagnetic radiation propagation through the plasma volume. The data is used to calculate the plasma electrical skin depth, plasma electron density and Deep-UV production efficiency. The RF signature can be used for day-to-day characterization of the non-magnetic microwave plasma-tool.

📜 SIMILAR VOLUMES

Near-field probing of photonic crystals

✍ E. Flück; M. Hammer; W.L. Vos; N.F. van Hulst; L. Kuipers 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 371 KB

Tunable near-field subwavelength microwa

Tunable near-field subwavelength microwave imaging

✍ Tejprakash Pochiraju; Oleksandr Malyuskin; Vincent Fusco 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 300 KB

## Abstract In this article, we show that a dielectric filled slot into which a capacitively loaded printed dipole antenna is inserted is capable of producing squeezing of the near electric field when excited by a cross polarized signal. Further, it is demonstrated that this effect can be used to p

Potential of near-field microwave imagin

Potential of near-field microwave imaging in breast cancer detection utilizing tapered rectangular waveguide probes

✍ Wael Saleh; Nasser Qaddoumi 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 878 KB

Microwave imaging for medical applications has been of interest for many years. A novel near-field microwave non-invasive testing and evaluation (NIT&E) technique utilizing tapered rectangular waveguide probes is presented for breast cancer detection. Near-field microwave NIT&E techniques can be a s

Microwave responses on locally modified

Microwave responses on locally modified by near-field microwave microscope

✍ Tadashi Machida; Shuuichi Ooi; Minoru Tachiki; Takashi Mochiku; Takuya Kato; Hid 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 280 KB

We have locally modified a cleaved surface of single crystalline Bi 2 Sr 2 CaCu 2 O 8þd by local anodic oxidation using scanning tunneling microscope-assisted near-field scanning microwave microscope (STM-assisted NSMM). After the modification, we have measured the resonant frequency and the quality

Improved Probes for Scanning Near-Field

Improved Probes for Scanning Near-Field Optical Microscopy

✍ Y. D. Suh; R. Zenobi 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 254 KB 👁 2 views

Near-field scanning Raman microscopy usi

Near-field scanning Raman microscopy using apertureless probes

✍ W. X. Sun; Z. X. Shen 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 290 KB

## Abstract We describe an apertureless near‐field scanning Raman microscope in reflection geometry developed by integrating a near‐field scanning optical microscope and a Raman spectrometer. This set‐up offers some unique features that make it applicable to more samples. The fabrication of the met