In this study, the radio frequency (RF) magnetron sputtering process is used to generate a PZT ferroelectric thin film on a silicon substrate. The surface characteristics of this lead zirconate titanate film Pb(Zr Ti )O is then investigated by means of an atomic force microscopy (AFM) method. The r
โฆ LIBER โฆ
Microtexture characterization of PZT ceramics and thin films by electron microscopy
โ Scribed by C.W. Tai; K.Z. Baba-kishi; K.H. Wong
- Book ID
- 104369005
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 229 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0968-4328
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