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Fabrication and characterization of PZT thin-film vibrators for micromotors

✍ Scribed by P. Muralt; M. Kohli; T. Maeder; A. Kholkin; K. Brooks; N. Setter; R. Luthier

Book ID: 108028343
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 854 KB
Volume: 48
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(95)00994-9

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