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Microtags with 150-nm line gratings fabricated by use of extreme-ultraviolet lithography

✍ Scribed by Descour, M. R.; Simon, D. I.; Sweatt, W. C.; Warren, M. E.; Kravitz, S. H.; Krenz, K. D.; Ray-Chaudhuri, A. K.; Stulen, R. H.

No coin nor oath required. For personal study only.

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