Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask

✍ Scribed by Lin, Hui ;Li, Lifeng

• Book ID: 115353977
• Publisher: The Optical Society
• Year: 2008
• Tongue: English
• Weight: 635 KB
• Volume: 47
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.47.006212