Fabrication of blazed gratings used in ultraviolet region by holographic ion beam etching based on photoresist melting

✍ Scribed by Wen-hao Li; Bayanheshig; Xiang-dong Qi; Yu-guo Tang

• Book ID: 107509486
• Publisher: Tianjin University of Technology
• Year: 2008
• Tongue: English
• Weight: 248 KB
• Volume: 4
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-008-7140-5