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Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography

✍ Scribed by Sankha S. Sarkar; Harun H. Solak; Jörg Raabe; Christian David; J. Friso van der Veen


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
484 KB
Volume
87
Category
Article
ISSN
0167-9317

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