✦ LIBER ✦

Microstructure of microwave dielectricthin films by RF magnetron sputtering

✍ Scribed by Feng Shi; Chuanwen Cui

Book ID: 108064195
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 823 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.11.007

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