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Microwave effect in RF magnetron sputtering of PbTiO3

✍ Scribed by M. Okuyama; Y. Togami; Y. Hamakawa

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 285 KB
Volume: 33-34
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(88)90361-3

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