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Microstructure of highly oriented, hexagonal, boron nitride thin films grown on crystalline silicon by radio frequency plasma-assisted chemical vapor deposition

✍ Scribed by Andújar, J. L.; Bertran, E.; Maniette, Y.


Book ID
121819650
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
551 KB
Volume
80
Category
Article
ISSN
0021-8979

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