Effect of Showerhead Configuration on Coherent Raman Spectroscopically Monitored Pulsed Radio Frequency Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Thin Films

✍ Scribed by B. Phillips; R. G. Rodriguez; L. D. Lau; S. D. Steidley

• Book ID: 111603262
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 933 KB
• Volume: 24
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1023/b:pcpp.0000013203.66666.34