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Effect of bipolar pulsed dc bias on the mechanical properties of silicon oxide thin film by plasma enhanced chemical vapor deposition

โœ Scribed by Su B. Jin; Sung I. Kim; Yoon S. Choi; In S. Choi; Jeon G. Han

Book ID
108079442
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
647 KB
Volume
11
Category
Article
ISSN
1567-1739

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