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Boron nitride phosphide thin films grown on quartz substrate by hot-filament and plasma-assisted chemical vapor deposition

✍ Scribed by Zhang, X. W. ;Xu, S. Y. ;Han, G. R.

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 226 KB
Volume: 201
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200406845

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