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Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

✍ Scribed by K.K. Chattopadhyay; A.N. Banerjee; S. Kundoo


Book ID
117357257
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
115 KB
Volume
57
Category
Article
ISSN
0167-577X

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