Microstructure and properties of nc-TiC/a-C:H films deposited by radio frequency reactive sputtering

✍ Scribed by Liu,

• Book ID: 126989422
• Publisher: Institute of Materials, Minerals and Mining
• Year: 2011
• Tongue: English
• Weight: 295 KB
• Volume: 27
• Category: Article
• ISSN: 0267-0836
• DOI: 10.1179/1743284710y.0000000025